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Auger Electron Spectroscopy
(AES)
is an analytical technique used to determine the elemental composition
and the chemical state of the atoms in the surface region of a solid
material.
Applications:
*Surface analysis (top ten
layers)
of solid conductive surfaces
*Element distribution mapping with high spatial resolution
*High resolution depth profiling
Specifications
Chamber base pressure: 5*10-10 Torr
Electron beam diameter (analytical resolution): 21nm10nA, 10kV;
12nm10nA, 20kV
Dark space resolution (image resolution): 6nm1nA, 20kV; 8.5nm10nA, 20kV
Sensitivity: 700kcps10nA, 10kV
Energy resolution < 0,5 % Floating extractor ion gun, ion beam
diameter @5kV < 100µm
Compucentric Zalar Rotation for high resolution depth profiles
Original Purchase price: $988,000.00
Ref: ELFESAN
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